>Dear MEMS community,
> Has any one used metal on SU-8 photoresist. We are having problems metal
sticking to SU-8.
>I would appreciate any inforamtion on it is passed on.
>Regards,
>Padmaja
>Padmaja Ramadas                                         (972)-927-1108 (w)
>Texas Instruments Incorporated                  (972)-995-7785(fax)
>P.O. Box 655012                                                 [email protected]
>M/S 945
>Dallas, Texas  75265
>
>
>

Dear Sir
How do you make the deposition and what kind of metal?
I have already observed this problem with gold (thermal evaporated)
Best regards

__________________________________________________________________
Dr H. Lorenz
Swiss Federal Institute of Technology (EPFL)
Institut for Microsystems
IN ECUBLENS
CH-1015 Lausanne, Switzerland
E-mail: [email protected]
Phone: +41(21)693 58 51
Fax:    +41(21)693 66 70

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