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MEMSnet Home: MEMS-Talk: Su 8 thickness
Su 8 thickness
2008-08-06
jiang Liudi
2008-08-06
Wei Cheng
2008-08-07
jiang Liudi
2008-08-08
eowin rohan
2008-08-06
jiang Liudi
2008-08-06
Oakes Garrett
2008-08-07
jiang Liudi
2008-08-08
Oakes Garrett
2008-08-12
jiang Liudi
2008-08-13
Oakes Garrett
Su 8 thickness
jiang Liudi
2008-08-07
Hi,
Many thanks for kind suggestions.

I think double coat could be the solution. could you further suggest procedures
of double layers in terms of baking, expose and PEB?According according to the
data sheet, 1700rpm should get almost 140um thickness. is it common for half the
thickness, compared with the sheet?

thanks again.
reply
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