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MEMSnet Home: MEMS-Talk: Re: SU-8
Re: SU-8
1998-08-20
Louis Guerin
1998-08-21
Hubert Lorenz
1998-08-25
Fred Tepper
1998-10-22
Louis Guerin
1998-10-22
[email protected]
1998-10-22
Xing Yang
1998-10-23
Louis Guerin
1998-10-22
[email protected]
Re: SU-8
Fred Tepper
1998-08-25
Could you tell me what the chemical composition is of SU-8?  Is it polymeric,
inorganic or
metallic?

We are working on new coating processes and are curious as to whether there is a
potential fit.

Fred Tepper,  Argonide Corp, 407-322-2500, www.argonide.com, [email protected]

Ramadas, Padmaja wrote:

> Dear MEMS community,
>  Has any one used metal on SU-8 photoresist. We are having problems metal
sticking to SU-8.
> I would appreciate any inforamtion on it is passed on.
> Regards,
> Padmaja
> Padmaja Ramadas                                         (972)-927-1108 (w)
> Texas Instruments Incorporated                  (972)-995-7785(fax)
> P.O. Box 655012                                                 [email protected]
> M/S 945
> Dallas, Texas  75265
>


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