The best thing would be put the first layer, pre-bake and then to pour the
thick layer of SU-8, I mean, just evaporate the solvent.
--- Den tors 2008-08-07 skrev jiang Liudi :
Från: jiang Liudi
Ämne: Re: [mems-talk] Su 8 thickness
Till: "General MEMS discussion"
Datum: torsdag 7 augusti 2008 09.22
Hi,
Thanks. I put SU8 down directly on pyrex wafer. could I ask when you spin thin
layer first, do you bake it before spin the second layer?