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MEMSnet Home: MEMS-Talk: Su 8 thickness
Su 8 thickness
2008-08-06
jiang Liudi
2008-08-06
Wei Cheng
2008-08-07
jiang Liudi
2008-08-08
eowin rohan
2008-08-06
jiang Liudi
2008-08-06
Oakes Garrett
2008-08-07
jiang Liudi
2008-08-08
Oakes Garrett
2008-08-12
jiang Liudi
2008-08-13
Oakes Garrett
Su 8 thickness
jiang Liudi
2008-08-12
hi,

Thanks again for the information.

sorry one more question,

If I coat two layers of 50um thick SU8, how long should I bake the 2nd layer
which has total 100um thickness? should it be soft baked as a 50um one or 100um
one?

Also, I am thinking of coating 4 layers of 50um thick SU8 to make up to 200um.
would you also have some experience on such multilayers? How would be the soft
bake time like for the 2nd, 3rd and 4th layer?

much appreciated again.

Best wishes,
Jiang
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