Peter, here are some papers on anodic bonding to silicon nitride,

Microfabrication of cantilever styli for the atomic force microscope
T.R. Albrecht et. al.
J.Vac. Sci. Technol. A, Vol 8, No. 4, Jul/Aug 1990

Detailed characterization of anodic bonding process between glass and
thin-film coated silicon substrates
T.M.H. Lee et al. Sensors and Actuators 86(2000)103-107

Effect of silicon oxide, silicon nitride and polysilicon layers on the
electrostatic pressure during anodic bonding
J.A. Plaza , J. Esteve, E. Lora-Tamayo
Sensors and Actuators A 67 (1998) 181-184

Fusion bonding of silicon nitride,

Low temperature Si3N4 direct bonding
Robert W. Bower and Mohd S. Ismail
Appl. Phys. Lett., Vol. 62, No. 26, 28 June 1993 p. 3485-3487

Roger Shile


-----Original Message-----

Hi all,

Does someone knows articles/recipes for SiN-SiN or SiN-Si waferbonding?

Thanks in advance.

Peter Kuijpers
MiPlaza
mailto:[email protected]