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MEMSnet Home: MEMS-Talk: Metal etching
Metal etching
2008-08-06
P.E.M. Kuijpers
2008-08-08
Robert Rehammar
2008-08-13
汪飞
2008-08-07
Jeff Kettle
Metal etching
汪飞
2008-08-13
Hi Robert,

I guess the journal should be J. Micromechanical system. Those two
articles are really helpful.

Good luck!

2008/8/8, Robert Rehammar :
> Hi Peter,
>
> Two very nice review articles about different etch-rates are by
> Williams, K. R. J. of Micromechanincal processing 1996 vol 5 pp 256-269
> and Part II by the same person 2003 same journal vol 12 pp 761.
>
> I know there are recipes to etch some or all of these metals. Not sure
> about selectivity towards ITO, but maybe somewhere to start.
>
> Regrds,
> Robert
>
> ons 2008-08-06 klockan 08:06 +0200 skrev P.E.M. Kuijpers:
>> Dear all,
>>
>> Can one of these metals  Cr, Ti, Cu or Mo selectively be etched compared
>> to
>> ITO and what kind of etchant can be used for this
>>
>> Thanks
>> Peter

--
Best regards,
Yours sincerely
Fei Wang
______________
State Key Lab of Transducer Technology,
Shanghai Institute of Microsystem and Information Technology,
Chinese Academy of Sciences
865 Changning Road, Shanghai 200050, China
Email:[email protected]
Tel:0086-21-62511070 ext.5468
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