If you pull a vacuum in the micro channel, then pull in the vapor of
heptadecafluoro silane.  There are a variety of hepta deca's, get back
to me for complete information.  This should give you a contact angle of
130 degrees compared to Teflon's 120 degrees.

 Bill Moffat

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Jian Wang
Sent: Tuesday, August 19, 2008 7:10 AM
To: 'General MEMS discussion'
Subject: [mems-talk] Gas Phase Lubricant

Dear all,

I am working on PDMS microdevice. I need to lubricate the moving parts
in the microchannels (200 um). Any suggestion about gas phase lubricant
for microchannels?

Appreciate your help.

Jian