it would depend on your spinner, ambient conditions and when you'll start
spinning your PDMS(if it starts to polymerize then you'll get thicker layers)
but 6000rpm for 60 sec could achieve a thin layer, otherwise try to increase the
speed!
---------- Initial Header -----------
>From : [email protected]
To : "General MEMS discussion" [email protected],"Le Cao Hoai Nam"
[email protected]
Cc :
Date : Fri, 22 Aug 2008 10:12:22 -0600
Subject : Re: [mems-talk] Commercial Vendors of Silicone membranes
> Hi,
> Wonderful, I am trying to spin around 10 micrometer of Sylgard 184 on 1
> to 2 inch glass wafers. Could you please tell me the spin parameters required
to
> do such a thin layer of PDMS.
>
> I appreciate you comments.
> Thank you
>
> Seyed