Hi,
Thank you for your reply!
I am sorry. Hard bake temperature is only 200 C. I used the standart recipe of
the SU8-2000.
If I reduce the spin rate, will the SU8-2000 file be uniform?
Best,


----- Original Message ----
From: Tolga YELBOGA 
To: General MEMS discussion 
Sent: Sunday, August 24, 2008 5:23:53 PM
Subject: Re: [mems-talk] Polyimide

Hi;
Your hard bake temperature is very high.  You should bake less than 2000C in
long time.

Did you use the standart recipe of the SU8-2000