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MEMSnet Home: MEMS-Talk: Low stress a-Si/Poly-Si thin film
Low stress a-Si/Poly-Si thin film
2008-08-28
Haixin Zhu
Low stress a-Si/Poly-Si thin film
Haixin Zhu
2008-08-28
Hello, all,

I am trying to find outside coating service to do LPCVD a-Si or Poly-Si
coating on 4 inch quartz wafer with low stress, any one can recommend a
company or research lab to me for this work?

Thanks

Michael
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