A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Positive Resist Development Mechanism
Positive Resist Development Mechanism
2008-09-02
[email protected]
2008-09-03
Brad Cantos
2008-09-04
Richard B. Keithley
2008-09-04
[email protected]
2008-09-03
Shay Kaplan
2008-09-03
[email protected]
2008-09-03
Bill Moffat
2008-09-04
[email protected]
2008-09-04
Brad Cantos
Positive Resist Development Mechanism
[email protected]
2008-09-02
      I did some research on positive resist development but could not find
any literature that shows what the development mechanism is of the
indene-carboxylic acid photoproduct.  Am I to assume that it's a straight
redox reaction (we use NaOH for our developer) producing a soluble salt
by-product and water?

      On a related note, I am trying to develop a flood expose and develop
strip system to remove photoresist (using a mercury arc lamp as an exposure
source and our current developer to strip).  It worked well in the initial
stages, but now we are getting some residue which seems to be a result of
the photoresist being affected by other wet processes involving
permanganate and/or iodine.  Would increasing NaOH concenration help
dissolve the resist?  Your thoughts are appreciated.


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing
Mentor Graphics Corporation
Nano-Master, Inc.