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MEMSnet Home: MEMS-Talk: How to prepare PMMA films
How to prepare PMMA films
2008-09-09
Dazhong Wu
2008-09-09
Jian SHI
2008-09-09
Dazhong Wu
2008-09-09
Kevin Paul Nichols
How to prepare PMMA films
Dazhong Wu
2008-09-09
Hi,

Thanks for your help. My application is to do nanolithography on PMMA film. Do
you have this kind of experience?

Sincerely,
Dazhong

> you can prepare the PMMA solution in acetone firstly, and deposited on
> glass slide by spin coater
> Depends the thickness of the PMMA film that you want, you can change the
> concentration of PMMA solution
> Also , you can buy the commercial PMMA solution

> Jian Shi
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