Hi Alim Polat,

When foil is really thin you can try to cut it with a lasermarking tool. While
using a glasplate to support the foil you are able to transport an remove the
foil without damaging it.

Regards,

Bernd



-----Ursprüngliche Nachricht-----
Von: [email protected] [mailto:[email protected]] Im
Auftrag von alim polat
Gesendet: Dienstag, 16. September 2008 12:18
An: [email protected]
Betreff: [mems-talk] How to cut thin ZnO foil without damaging surfaceroughness
and without deformation!

Hello Everyone

I have this thin ZnO thin film foil and I want to cut it to get mm
scale, for example 7 mm x 7 mm without damaging its surface
smoothness. So the two important factors are:
1. Surface should stay smooth. No damage to the surface.
2. Also I don't want to deform the surface when I cut it.
I really appreciate if you give me some suggestions. Thank you very
much. Let's support MEMS-TALK.