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MEMSnet Home: MEMS-Talk: negative resist peeling problem
negative resist peeling problem
2008-09-16
Javier Crespo
2008-09-16
Jaibir sharma
2008-09-17
Shay Kaplan
negative resist peeling problem
Jaibir sharma
2008-09-16
I feel you can check the expiry date of NPR.

On Tue, 16 Sep 2008 Javier Crespo wrote :
>Dear all,
>
>I'm having a problem with the negative resist developing. I'm using the same
process as always, but from 2 months ago I am having a problem of resist peeling
when  developing. I mean, the resist is completely stocked to the substrate, but
it seems that a little upper layer of resist goes out forming some wires of
resist. These wires during the development process can stick to other
substrates. I have checked the softbaking temperature, the spinner, the exposure
machine and different lots of resist and developer and I didn't find any
solution.
>
>The resist I am using is SC from Fujifilm (5 microns layer).
>
>Could anyone tell me what I can try?

with regrads

Jaibir Sharma
Reasearch Scholar(PhD)
Electrical Department,
IIT Madras,
Chennai - 36
INDIA

Phone:044-22575444(off)
      09445311513(home)
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