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MEMSnet Home: MEMS-Talk: glass and coated thin film silicon anodic wafer bonding
glass and coated thin film silicon anodic wafer bonding
2008-09-18
li shifeng
2008-09-19
Brubaker Chad
2008-09-19
Kuijpers, P e m
2008-09-19
shay kaplan
2008-10-02
Brubaker Chad
2008-09-19
[email protected]
glass and coated thin film silicon anodic wafer bonding
li shifeng
2008-09-18
Hi, colleagues,

I want to bond glass and silicon wafer using anodic bonding. The silicon wafer
is coated with 20nm SiO2/20nm a-Si/20nm SiO2 stack film. The glass wafer is
etched channels with 100nm width and 50 nm depth. I am wondering if there are
any problems to bond them.

Thanks
Dlee
reply
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