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MEMSnet Home: MEMS-Talk: glass and coated thin film silicon anodic wafer bonding
glass and coated thin film silicon anodic wafer bonding
2008-09-18
li shifeng
2008-09-19
Brubaker Chad
2008-09-19
Kuijpers, P e m
2008-09-19
shay kaplan
2008-10-02
Brubaker Chad
2008-09-19
[email protected]
glass and coated thin film silicon anodic wafer bonding
Kuijpers, P e m
2008-09-19
Hi,

Isn't native oxide something about 12A (1.2 nm) thick??

Peter Kuijpers
mailto:[email protected]
________________________________________
Van: [email protected] namens Brubaker Chad [[email protected]]
Verzonden: vrijdag 19 september 2008 2:52
Aan: General MEMS discussion
CC: Brubaker Chad
Onderwerp: Re: [mems-talk] glass and coated thin film silicon   anodicwafer
bonding

There should not be - 20nm of SiO2 isn't much more than native oxide
anyway.

Best Regards,
Chad Brubaker
reply
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