glass and coated thin film silicon anodic wafer bonding
Kuijpers, P e m
2008-09-19
Hi,
Isn't native oxide something about 12A (1.2 nm) thick??
Peter Kuijpers
mailto:[email protected]
________________________________________
Van: [email protected] namens Brubaker Chad [[email protected]]
Verzonden: vrijdag 19 september 2008 2:52
Aan: General MEMS discussion
CC: Brubaker Chad
Onderwerp: Re: [mems-talk] glass and coated thin film silicon anodicwafer
bonding
There should not be - 20nm of SiO2 isn't much more than native oxide
anyway.
Best Regards,
Chad Brubaker