glass and coated thin film silicon anodic wafer bonding
shay kaplan
2008-09-19
Depends on what is the xtal direction and the environment - usually more
towards 40-60A
-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Kuijpers, P e m
Sent: Friday, September 19, 2008 8:36 AM
To: General MEMS discussion
Cc: Brubaker Chad
Subject: Re: [mems-talk] glass and coated thin film silicon anodic wafer
bonding
Hi,
Isn't native oxide something about 12A (1.2 nm) thick??
Peter Kuijpers