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MEMSnet Home: MEMS-Talk: glass and coated thin film silicon anodic wafer bonding
glass and coated thin film silicon anodic wafer bonding
2008-09-19
Brubaker Chad
2008-09-18
li shifeng
2008-09-19
Kuijpers, P e m
2008-09-19
shay kaplan
2008-10-02
Brubaker Chad
2008-09-19
[email protected]
glass and coated thin film silicon anodic wafer bonding
shay kaplan
2008-09-19
Depends on what is the xtal direction and the environment -  usually more
towards 40-60A

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Kuijpers, P e m
Sent: Friday, September 19, 2008 8:36 AM
To: General MEMS discussion
Cc: Brubaker Chad
Subject: Re: [mems-talk] glass and coated thin film silicon anodic wafer
bonding

Hi,

Isn't native oxide something about 12A (1.2 nm) thick??

Peter Kuijpers
reply
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