You might consider using a diffusion barrier layer between the nitride and Au.
Also, watch out for eutectic alloys with your adhesion layer.

-Michael

>>> "abhaya joshi"  9/18/2008 10:20 PM >>>
Hi all

i am having gold layer of 1.5 um on Si3N4 coated Si wafer.
i would like to treat this wafer at 650C.
what will be the effect on gold.

in my previous experiment, the when i coated the gold on silicon and treated
for 600C., i observed the re-flow of gold.
can any one tell me the cause for this?