Yes, you can do a standard KOH orientation-dependent etch.
Antimony (Sb) is an n-type dopant (like P and As) and will not slow the
silicon etch rate, as p-type dopants (like B) will.

    --Kirt Williams

----- Original Message -----
From: "Kuijpers, P e m" 
To: 
Sent: Friday, September 19, 2008 1:59 AM
Subject: [mems-talk] KOH etch on Si


Hi all,

Can we perform standard KOH etch on highly Sb doped Si wafers?
So we will get the same etch angle of 54.7°?

Thanks

Peter Kuijpers