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MEMSnet Home: MEMS-Talk: Anodic bonding
Anodic bonding
2008-09-19
Kuijpers, P e m
2008-09-20
matthew king
2008-10-02
Brubaker Chad
2008-10-03
ashwini jambhalikar
2008-10-03
Brubaker Chad
2008-09-24
Daniela Kögler
2008-09-24
Bill Moffat
2008-09-24
Sood, Sumant
2008-11-03
Daniela Kögler
2008-11-06
Brubaker Chad
Anodic bonding
matthew king
2008-09-20
Hi,

  Similar questions have been asked alot.

Serach for 'anodic bonding soi' in this maillist.

                           Matthew King

==========================
"Kuijpers, P e m"  wrote:
  Hi,

Can we perform anodic bonding on Pyrex and SOI wafers?
Thickness of the oxide layer is app.0.5 µm.
Maybe some recipe guidelines also.

Thanks.

Peter Kuijpers

mailto:[email protected]
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