Hi,
Similar questions have been asked alot.
Serach for 'anodic bonding soi' in this maillist.
Matthew King
==========================
"Kuijpers, P e m" wrote:
Hi,
Can we perform anodic bonding on Pyrex and SOI wafers?
Thickness of the oxide layer is app.0.5 µm.
Maybe some recipe guidelines also.
Thanks.
Peter Kuijpers
mailto:[email protected]
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