A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: "cavity" formation after annealing of evaporated aluminium on Si
"cavity" formation after annealing of evaporated aluminium on Si
2008-09-26
Julie Verstraeten
2008-09-27
shay kaplan
2008-09-27
Bill Moffat
2008-09-29
Julie Verstraeten
2008-09-30
Ngo Ha Duong
"cavity" formation after annealing of evaporated aluminium on Si
Bill Moffat
2008-09-27
WE used to live with hillocks when we were trying advanced processing 2
layers of metal.  Hey this was in the 80"s, did not have a cure but it
caused a lot of metal to metal short problems. If you research aluminum
hillock problems some one should have a solution by now.

Bill Moffat

________________________________

From: [email protected] on behalf of shay kaplan
Sent: Sat 9/27/2008 12:31 AM
To: [email protected]; 'General MEMS discussion'
Subject: Re: [mems-talk] "cavity" formation after annealing of evaporated
aluminium on Si

Julie,

Sound like hillocks. It forms when heating evaporated aluminum because of
the TCE differences. The aluminum expands gets detached from the surface
causing the small bumps that remain when the sample is cooled.

Shay

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Mentor Graphics Corporation
Harrick Plasma, Inc.
Addison Engineering