Actually, on page 24 of SEMI M1-1106, the bow is listed as maximum 60um and
not 0.06um.  I'd be interested in getting wafers with a bow as low as ..06um.

Jeff Besterman
Addison Engineering
150 Nortech Parkway
San Jose, CA 95134
office phone 408-956-5101
office fax 408-956-5111
www.addisonengineering.com

-----Original Message-----
From: Laura Malatto [mailto:[email protected]]
Sent: Thursday, October 02, 2008 4:47 AM
To: General MEMS discussion
Subject: Re: [mems-talk] wafer bow spec

It´s about  0.06 um

Laura

John-Rolf Oakley escribió:
> Hello,
>
> I am having trouble keeping vacuum on some wafers and I was wondering if
anyone could tell me what the SEMI standard for wafer bow is on 6", 675um,
single flat, single side polished, <100>, P type Si?
>
> Thanks