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MEMSnet Home: MEMS-Talk: Questions regarding silane coating and surface cleaning
Questions regarding silane coating and surface cleaning
2008-10-06
김태진
2008-10-07
Joshua Tice
2008-10-08
Dirk Renckens - TNW
2008-10-08
Bill Moffat
2008-10-07
Boris Kobrin
Questions regarding silane coating and surface cleaning
김태진
2008-10-06
Hi!

I'm trying to treat Silicon wafers or PDMS with Silane to make it hydrophobic.
As far as I recall, all I need is a dessicator.

But someone told me that I need a plasma asher for it.
Is this true? How exactly do I coat Silane on surfaces?

Also, I'm trying to purchase a cost effective plasma system for Silicon, glass
and PDMS surface cleaning.

My second question is: is a microwave type oxygen plasma system good enough for
surface cleaning?

Thank you!
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