Questions regarding silane coating and surface cleaning
김태진
2008-10-06
Hi!
I'm trying to treat Silicon wafers or PDMS with Silane to make it hydrophobic.
As far as I recall, all I need is a dessicator.
But someone told me that I need a plasma asher for it.
Is this true? How exactly do I coat Silane on surfaces?
Also, I'm trying to purchase a cost effective plasma system for Silicon, glass
and PDMS surface cleaning.
My second question is: is a microwave type oxygen plasma system good enough for
surface cleaning?
Thank you!