The easiest way to treat Silicon to render it hydrophobic is vapor
deposition of silanes.
The quality (cleanliness) of the substrate material is critical for
achieving a good coverage.
You may contact me for further details.

Boris Kobrin, Ph.D.
Chief Scientist
Office: 408 907-2885 x2805
Mobile: 408 806-6859
[email protected]

Message: 1
Date: Tue, 7 Oct 2008 07:53:33 +0900
From: ??? 
Subject: [mems-talk] Questions regarding silane coating and surface cleaning
To: 
Message-ID: 
Content-Type: text/plain; charset="ks_c_5601-1987"

Hi!

I'm trying to treat Silicon wafers or PDMS with Silane to make it
hydrophobic.
As far as I recall, all I need is a dessicator.

But someone told me that I need a plasma asher for it.
Is this true? How exactly do I coat Silane on surfaces?

Also, I'm trying to purchase a cost effective plasma system for Silicon,
glass and PDMS surface cleaning.

My second question is: is a microwave type oxygen plasma system good enough
for surface cleaning?

Thank you!