A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Parylene mask for KOH etch
Parylene mask for KOH etch
2008-10-07
Konstantin Glukh
2008-10-08
[email protected]
2008-10-09
Kasman, Elina
2008-10-08
LO
2008-10-09
Michael Larsson
Parylene mask for KOH etch
Konstantin Glukh
2008-10-07
Can anyone comment on using Parylene as a mask for KOH etch, either by
itself or in addition to SiO2 hardmask? Is there any way to ensure
good adhesion to Si and SiO2 and minimize undercut rate?
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
MEMStaff Inc.
Addison Engineering
Tanner EDA by Mentor Graphics