Sapphire is very tough to etch while you can etch aluminum in Phosphoric
acid or base like KOH or NaOH
Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Berg, Jordan
Sent: Wednesday, October 08, 2008 8:48 PM
To: [email protected]
Subject: [mems-talk] PAN etch selectivity over sapphire

Does anyone know if a standard aluminum PAN etch (phosphoric acid-acetic
acid-nitric acid) will etch or damage a sapphire wafer? We are trying to
remove a 60 nm-thick aluminum film from a sapphire wafer.

Thanks!
Jordan