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MEMSnet Home: MEMS-Talk: Plasma etch of GaN?
Plasma etch of GaN?
2008-10-08
Kasman, Elina
2008-10-09
basar bolukbas
Plasma etch of GaN?
Kasman, Elina
2008-10-08
Is anyone here doing dry etching for gallium nitride? Or any other
processing with this material? I'd be grateful to discuss that with you!

Thanks

Elina Kasman

Process Development Engineer, R&D
Engis Corporation
Phone: 1(847) 484-7225
E-mail: [email protected]

reply
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