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MEMSnet Home: MEMS-Talk: How to deposit Tungsten blanket on Oxide layer
How to deposit Tungsten blanket on Oxide layer
2008-10-10
Pothisorn, Araya - potay006
2008-10-10
Kirt Williams
2008-11-14
Henn, Gudrun: Ms.
How to deposit Tungsten blanket on Oxide layer
Pothisorn, Araya - potay006
2008-10-10
Hi all,

I'm new in MEMS. Does anyone have experience in deposit tungsten on
Oxide layer? I need to deposit 1000 angstorm of tungsten blanket on the
oxide layer.

Regards,

Araya
reply
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