Hi,

you can look for this paper, It may help you:

 Jaibir Sharma and Amitava DasGupta, "low temperature wet release process for
low stiffness structures" Journal of Micro/ Nanolithography MEMS& MOEMS,Vol. 7,
No.4, Oct–Dec 2008 issue.

bye
jaibir

with regrads

Jaibir Sharma
Reasearch Scholar(PhD)
Electrical Department,
IIT Madras,
Chennai - 36
INDIA

Phone:044-22575444(off)
      09445311513(home)