Hello all,

We are planning the construction of a clean room for MEMS polymer
fabrication in Mexico City. I can not find information about if there is a
standard way to determine the yellow light intensity in the lithography
clean room areas. If somebody could give me an advice on this, it would be
highly appreciated.

Thanks so much

Laura A. Oropeza Ramos, Ph.D.
Posdoctoral Researcher
IIMAS-Institute of Applied Mathematics and Systems
UNAM
Apartado Postal 20-726, Administración No. 20
Delegación Alvaro Obregón, México 01000, D.F.
México