I do not think there is a standard.  We used to fit the yellow room with
standard fluorescent lights then put a yellow sleeve over the light tube.  The
yellow filter removes the U.V. portion of the light so the photo resist is not
exposed at the wrong times.

 Bill Moffat

-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of Laura Oropeza Ramos
Sent: Wednesday, October 15, 2008 9:29 AM
To: [email protected]
Subject: [mems-talk] light type and intensity for a clean room lithographyarea

Hello all,

We are planning the construction of a clean room for MEMS polymer fabrication in
Mexico City. I can not find information about if there is a standard way to
determine the yellow light intensity in the lithography clean room areas. If
somebody could give me an advice on this, it would be highly appreciated.

Thanks so much

Laura A. Oropeza Ramos, Ph.D.