Dear all,

Can anyone suggest a front side protective material such as those used in
SOI-MUMPs. Basically I want to make a suspension structure on the device
layer of a SOI die and cut off the silicon at the handle layer. I wish to
find a suitable polymer coating to protect the DRIE etched structures on the
front side, so that backside DRIE etching and sio2 wet etching will not
attack front side structures.

Thank you very much and I'd be grateful to discuss that with you!

Jingyan