Is there any software for etching/development
simulation?
Denis Petrov
2008-10-22
Hi Jarod,
as far as I understand, IntelliSense has a module that simulates
different etching processes (Bosch Process for instance).
Regards,
Denis
2008/10/22 jarod vincent :
> Dear all,
>
> Is there any software for etching/development simulation? I found there is
> no such package in Ansys. Is there any commercial software?
> Thank you for suggestion.
>
> Best Regards
> Jarod Vincent