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MEMSnet Home: MEMS-Talk: Re: Spin coating of the THICK PMMA
Re: Spin coating of the THICK PMMA
1998-09-13
Jayant Neogi
1998-09-14
Armin Kuebelbeck
1998-09-30
Skrobis, Ken
Re: Spin coating of the THICK PMMA
Armin Kuebelbeck
1998-09-14
For the coating I don't have a proper solution, but for the adhesion you
should try to use an adhesion promoter. Union Carbide has some excellent
types with functional groups. They call it SILAN.

Armin Kuebelbeck

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