Prolith is a commercial product.
Don't remember who sells it though.

Shay Kaplan

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Brad Cantos
Sent: Thursday, October 23, 2008 1:51 AM
To: jarod vincent; General MEMS discussion
Subject: Re: [mems-talk] Is there any software for
etching/developmentsimulation?

Jarod,

Many years ago, there was a program called "PROLITH" that modeled exposure
and development simulations for positive novalac photoresists.  Below is a
reference to a paper that introduced it.  A few years after it was
introduced they tried to market it commercially, and I don't know the
current status.  You may be able to trace down the author, Chris Mack.

Mack C. A. : ³PROLITH : a comprehensive optical lithography model² , SPIE,
538, pp. 207-219 (1985).

Brad Cantos


On 10/22/08 12:22 PM, "jarod vincent"  wrote: