Prolith was originally developed by Chris Mack while working for the NSA in the
1980's.  It has gone through numerous revisions and ownership transfers.  It is
now marketed by KLA-Tencor Corp.  Information is available in their Product
Portfolio on their website listed under Computational Lithography.  I don't know
if it has any use for etch modeling but it certainly is useful for develop
modeling.

Mike Stan

-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of Shay Kaplan
Sent: Thursday, October 23, 2008 2:10 AM
To: 'General MEMS discussion'
Subject: Re: [mems-talk] Is there any software for
etching/developmentsimulation?

 Prolith is a commercial product.
Don't remember who sells it though.

Shay Kaplan