Dear Ruilin,

It could be a high humidity in the environment.

Do you have the same environment conditions as before?

Good luck,

-----Mensaje original-----
De: GARCIA BLANCO Sonia [mailto:[email protected]]
Enviado el: martes, 21 de octubre de 2008 18:18
Para: General MEMS discussion
Asunto: Re: [mems-talk] SU-8 layer stick to mask after exposure

Hi Ruilin,

I had that porblem once and it was due to insufficient soft-bake temperature.
Check if you have maybe some problem with your hotplate? If that is correct,
maybe you are under-exposing.

Good luck!

Sonia Garcia Blanco, PhD