Ruilin,
If it is high humidity a hydrophobic coating on the SU8 and the
mask will fix it. Bill Moffat
-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Javier Crespo
Sent: Thursday, October 23, 2008 7:09 AM
To: General MEMS discussion
Subject: Re: [mems-talk] SU-8 layer stick to mask after exposure
Dear Ruilin,
It could be a high humidity in the environment.
Do you have the same environment conditions as before?
Good luck,