A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: SU-8 layer stick to mask after exposure
SU-8 layer stick to mask after exposure
2008-10-21
郑瑞麟(Ruilin Zheng)
2008-10-21
Bill Moffat
2008-10-21
GARCIA BLANCO Sonia
2008-10-22
郑瑞麟(Ruilin Zheng)
2008-10-22
Gareth Jenkins
2008-10-23
Javier Crespo
2008-10-23
Bill Moffat
2008-10-21
Michael Larsson
2008-10-22
Michael Larsson
2008-10-23
Suzanne Scullen Ericson
2008-10-24
郑瑞麟(Ruilin Zheng)
2008-10-24
Gareth Jenkins
2008-11-07
郑瑞麟(Ruilin Zheng)
SU-8 layer stick to mask after exposure
Bill Moffat
2008-10-23
Ruilin,
       If it is high humidity a hydrophobic coating on the SU8 and the
mask will fix it.  Bill Moffat

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Javier Crespo
Sent: Thursday, October 23, 2008 7:09 AM
To: General MEMS discussion
Subject: Re: [mems-talk] SU-8 layer stick to mask after exposure

Dear Ruilin,

It could be a high humidity in the environment.

Do you have the same environment conditions as before?

Good luck,
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Nano-Master, Inc.
Harrick Plasma, Inc.
Addison Engineering