Hi Jarod,

Coventorware bought a free wet-etch simulator and incorporated it into
their suite. IntelliSuite is better software overall, and I assume it
too has an etch simulator. Both packages are very expensive, however,
so do a search for free packages.

There used to be one called SEGS (http://mira.me.tuns.ca),
web-accessible software developed by researchers at Cal Tech, but the
link doesn't seem to function anymore. Perhaps the software was also
bought by a larger fish.

Regards,

Michael Larsson

>
> ---------- Forwarded message ----------
> From: "jarod vincent" 
> To: [email protected]
> Date: Wed, 22 Oct 2008 14:22:04 -0500
> Subject: [mems-talk] Is there any software for etching/development simulation?
> Dear all,
>
> Is there any software for etching/development simulation? I found there is
> no such package in Ansys. Is there any commercial software?
> Thank you for suggestion.
>
> Best Regards
> Jarod Vincent
>