Hi Jarod,

Synopsys (www.synopsys.com) and Silvaco (www.silvaco.com) are the big
commercial software vendors offering products for litho/etch/implant
etc. simulation. They are normally used in IC design, but also in MEMS.
The Synopsys software framework is called Sentaurus , the Silvaco one is
called Athena (descendant of SUPREM-IV from Stanford).

KR,
Martin


Am Donnerstag, den 23.10.2008, 22:15 +0100 schrieb Michael Larsson:
> Hi Jarod,
>
> Coventorware bought a free wet-etch simulator and incorporated it into
> their suite. IntelliSuite is better software overall, and I assume it
> too has an etch simulator. Both packages are very expensive, however,
> so do a search for free packages.
>
> There used to be one called SEGS (http://mira.me.tuns.ca),
> web-accessible software developed by researchers at Cal Tech, but the
> link doesn't seem to function anymore. Perhaps the software was also
> bought by a larger fish.
>
> Regards,
>
> Michael Larsson