On Wed, Oct 22, 2008 at 3:22 PM, jarod vincent  wrote:
>
> Is there any software for etching/development simulation? I found there is
> no such package in Ansys. Is there any commercial software?
> Thank you for suggestion.
>
> Best Regards
> Jarod Vincent

Jarod,

You can try ACES software developed by UIUC MASS Group. The original
download link  have been dead for a long time by an executable file is
still available for download at
http://www.ee.byu.edu/cleanroom/KOH.phtml

Good luck,

Konstantin