Hi Robert,

         Do you need to fill them or merely protect the internal surfaces?
If only protection required the EVG Nanospray will do the job.
If you need to fill them then the spray can act to initially wet the
internal surfaces and help fill during coating.

Jan

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Black, Robert
Sent: 27 October 2008 15:04
To: [email protected]
Subject: [mems-talk] Filling deep vias with resist

     I'm trying to fill some deep vias (25um wide, 70um deep) with resist. I
can't seem to get the resist to go any deeper than about 40um. The best
results were with using a PGMA pre-wet.  I've tried some 55cp resist that I
coated three times to fill (based on top down zygo) and some 120 cp resist.
X-sections show both resists to only be 40um down the vias.
    Any suggestions?

Robert