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MEMSnet Home: MEMS-Talk: germanium dry etch
germanium dry etch
2008-10-30
Andrea Mazzolari
germanium dry etch
Andrea Mazzolari
2008-10-30
Good morning every one,
i need to realize dry etch in Germanium wafers, 4'' diameter.
Wafers are 500um or 250um thick and i need to realize passing holes.
Is there someone able to operate dry etch in Germanium ?

Best regards,
Andrea

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