Hi all,

I'm a first year graduate student, just started my research topic.

I want to fabricate some structures using iron or iron oxide. But I
don't know what is the conventional method to grow a iron/iron oxide
film?

Is iron an incompatible material for MEMS? Why there's so little
literature about it?

If I can't use iron, what are some most commonly used magnetic
materials in MEMS? I know nickel is one of them.

Thank you so much for your help!

Best regards,
--
Yours, Travis (Wang, Xiaoning)
Graduate Student
Mechanical Engineering
Boston University