Travis,

Look to the magnetic recording industry for information on magnetic
alloys.  Plating (of say, NiFe) is a typical method for putting down
magnetic films onto a substrate.  I have seen compositions range from
80/20 to 45/55 depending on the magnetic field requirements.

I hope this helps.

Best Regards,
Garrett Oakes

EV Group
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-----Original Message-----
From: Xiaoning Wang [mailto:[email protected]]
Sent: Monday, November 03, 2008 12:07 PM
To: [email protected]
Subject: [mems-talk] Magnetic material in MEMS

Hi all,

I'm a first year graduate student, just started my research topic.

I want to fabricate some structures using iron or iron oxide. But I
don't know what is the conventional method to grow a iron/iron oxide
film?

Is iron an incompatible material for MEMS? Why there's so little
literature about it?

If I can't use iron, what are some most commonly used magnetic
materials in MEMS? I know nickel is one of them.

Thank you so much for your help!

Best regards,
--
Yours, Travis (Wang, Xiaoning)
Graduate Student
Mechanical Engineering
Boston University