Matthew-

The following paper should address your need:

Rabinovich, et al, "The effect of release-etch holes on the electromechanical
behavior of MEMS structures"
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997
http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?tp=&arnumber=635400&isnumber=1378
7


Raj Gupta, PhD
Volant Technologies
+1.415.391.0426
http://terahz.org


----- Original Message ----
From: matthew king 
To: [email protected]
Sent: Friday, October 31, 2008 4:31:27 AM
Subject: [mems-talk] capacitance calculation of perforated rotating plate

Hi all,

    Is there any method to get the capacitance of
perforated rotating plate other than FEM or BEM? Any
kings of help is appreciated.

    Thanks in advance.

                                     Matthew King