Sounds like phosphine. Probably very low concentration - otherwise, you
wouldn't be writing this email. This is the gas they add to the silane or
other silicone source gas to grow doped poly or phosphor-doped silicon
dioxide.

Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Nicolas Duarte
Sent: Friday, November 07, 2008 2:47 PM
To: General MEMS discussion
Subject: [mems-talk] Smelly Wafers

I just started a new job where, after an HF etch to remove phosphor
glass, the wafers have a pungent garlic smell to them.  I asked my
coworkers about this and they said it was "normal," but I have never
encountered a wafer that had a scent.  It has been my experience that
where there is smell there is a contaminant so I was wondering if
anyone know what the potential source of this smell may be.

Nicolas Duarte