Hi all,

I am having problems to remove the SU-8 after electroplating. The process I
am using is the recommend one of MicroChem: firstly, spin Omnicoat on
substrate at 3000 rpm for 30 s and bake it at 200 ˚C for 1 min. then
pattern Su-8, followed by uncovered Omnicoat  removal using Oxygen plasma
for 8 min. Then do the electroplating. To remove the SU-8, I put the
samples in 80 ˚ Remover PG, which is stirred by magnetic stirrer at ~500
rpm for 2 h. However, some su-8 residues are still stay on the sample,
especially along the edge of the small features.

Would you please give some suggestions to fully remove the SU-8?

Thank you very much!

Meifang

PhD student, Microelectronics Research Group
School of Electrical, Electronic & Computer Eng.,
& School of Mechanical Eng.
The University of Western Australia
Tel: +61-8-6488-3745
  Email: [email protected]