Aravind:  I have been working with Penn State University for about 6 years
with excellent results.  They can put down up to 12 microns of high quality
sol-gel PZT on Pt coated silicon wafers.  The person to contact there is
Professor Eric Cross (814) 865-1181.  I also know that at UC Berkeley they
sputter PZT films, as well as do laser ablated films.  The contact there is
Jim Bustillo, (510) 642-2716.

    Jon Bernstein

At 09:56 AM 9/4/98 -0500, you wrote:
>I am looking for information on vendors (companies or universities) for
>putting down PZT and or AlN. I would prefer MOCVD/sputtering techniques but
>other methods like sol-gel or screen printing are also acceptable.
>
>Any information or comments would be highly appreciated. Thanks in advance.
>
> --Aravind
>
>Aravind Padmanabhan
>Honeywell Technology Center
>ph: 612-954-2970
>email:[email protected]
>
>
Jonathan Bernstein
MEMS Technology Center
Draper Laboratory, MS 37
555 Technology Square
Cambridge, MA 02139

email:  [email protected]
(617) 258-2513
Fax:  617-258-4238